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Why does my SEM image charge and drift?

By Vvon Engineering Team | Published | Updated

Charging and drift produce different artefacts and have different fixes, and treating them as one problem wastes weeks. How to tell them apart in two images, and what to change first.

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An image looks acceptable at low magnification and falls apart above it: bright streaks that shift between scans, edges that glow, or a field that slides steadily in one direction over a slow scan. These are two separate faults with two separate cures, and groups routinely spend weeks applying the fix for one to the other.

They are different faults with different signatures

Charging is an electrical effect at the specimen. The incident and emitted electron currents do not balance, and insufficient charge dissipation changes the local potential. This can deflect the beam or alter the signal. Signatures can include brightness jumps, streaking, distorted edges and contrast that changes with magnification or scan conditions.

Drift is a mechanical or thermal problem. The specimen and the field of view move smoothly and continuously relative to the beam. The signature is a steady shear: a slow scan image is skewed in the scan direction, features stretch, and the whole field has translated when you return to it.

The quickest way to separate them: capture a field, blank the beam or move it away, wait a few minutes, and capture the same field again. If the features have translated but look clean, it is drift. If they are in the same place but the contrast and brightness have changed, or the artefacts move each time you scan, it is charging. Charging can also cause apparent drift, so if both are present, fix the charging first.

Fixing charging

Fixing drift

The causes specific to a Bangladeshi building

Work in that order and most cases close quickly. Coat the specimen and lower the accelerating voltage, ground the surface properly, then leave it in the chamber long enough to settle. Only when a well-mounted, coated, thermally settled specimen still drifts is it worth measuring the room, and by then you will have a much better case for the money that involves.

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