Endeavor RF Ion Source
Brand: Denton Vacuum | Category: Nanotechnology
A filament-free radio frequency ion source with a single extraction grid, used for ion assisted deposition and pre-clean. The electron flux from the source neutralises the ion beam space charge, so no separate hot filament or hollow cathode neutraliser is required.
Technical Specifications
| Parameter | Value |
|---|---|
| Design | filament-free, single extraction grid |
| Specification | No auxiliary electron neutraliser required |
| Specification | Currently available on new systems |
| Specification | Denton also supplies the internally developed CC-106 broad beam cold cathode DC source for oxygen or argon |
| Applications | optical devices, photonics, magnetic and microelectronic devices |
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Contact Vvon Technologies Limited about Denton Vacuum equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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