MiniLab 080
Brand: Moorfield Nanotechnology | Category: Nanotechnology
A modular PVD system built around e-beam evaporation capability with sputtering available by configuration. It is used for solar cell, sensing and imaging research on substrates up to 8 inches, with RF and DC substrate bias.
Technical Specifications
| Parameter | Value |
|---|---|
| Maximum substrate size | 8 inch (200 mm) |
| E-beam evaporation | Telemark 246-6 |
| Thermal and LTE evaporation | TE1 plus LTE sources available |
| Substrate heating | up to 800 deg C with SSIC heater |
| Specification | Optional load lock for up to 8 substrates, dual chamber available |
| Rate and thickness monitoring | up to 4 water cooled QCM with optional SQC-310 |
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Contact Vvon Technologies Limited about Moorfield Nanotechnology equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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