Plasma Emission Monitoring (PEM)
Brand: Denton Vacuum | Category: Nanotechnology
A closed loop control system for transition mode, high rate reactive sputtering of metal oxides and nitrides. It reads a plasma emission line in real time and adjusts the reactive gas setpoint to hold intensity constant, which avoids target poisoning and keeps deposition rates near metal mode.
Technical Specifications
| Parameter | Value |
|---|---|
| Control | closed loop feedback on a monitored plasma emission line |
| Function | automatically adjusts reactive gas setpoint to maintain constant intensity |
| Specification | Enables near-metal mode deposition rates for insulating films |
| Applications | high rate optical film deposition, process quality control, metallurgical research |
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Contact Vvon Technologies Limited about Denton Vacuum equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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