Voyager PE-CVD
Brand: Denton Vacuum | Category: Nanotechnology
A plasma enhanced chemical vapour deposition system focused on diamond-like carbon, able to coat flat wafers and three dimensional parts such as optical lenses. An optional chamber configuration allows metals to be co-sputtered during deposition to give metal doped DLC films.
Technical Specifications
| Parameter | Value |
|---|---|
| Source | RF capacitively coupled source for DLC coatings |
| Substrate size | small components up to 200 mm wafers |
| Specification | Optional chamber configuration for co-sputtering metals during DLC deposition |
| Control | Denton ProcessPro system for automated and manual process control |
| Specification | Compatible with all front end options including the Versa cluster architecture |
| Applications | scratch-resistant displays, wear coatings, IR transparent protective films |
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Contact Vvon Technologies Limited about Denton Vacuum equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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