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6-Axis NanoMax NanoPositioning Flexure Stages (MAX600 Series)

Brand: ThorLabs | Category: Scientific & Laboratory Equipment

6-Axis NanoMax NanoPositioning Flexure Stages (MAX600 Series)

Parallel flexure stages that give six independent degrees of freedom about a common pivot point, which simplifies alignment and reduces crosstalk. Micrometer, stepper and piezo drive options cover coarse travel down to nanometre steps.

Technical Specifications

ParameterValue
Travel4 mm in X, Y and Z; 6 degrees (105 mrad) in pitch, yaw and roll
Deck height112.5 mm; optical axis height 125 mm
Maximum load capacity1 kg (2.2 lbs)
RMS repeatability30 nm over 30 micrometres
Stiffness1 N per micrometre in X and Z, 0.5 N per micrometre in Y
SpecificationInternal piezo travel 30 micrometres at 0 to 75 V; resonant frequency above 130 Hz

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