AZtec LayerProbe
Brand: Oxford Instruments | Category: Nanotechnology
LayerProbe is a thin film analysis option for the AZtec energy dispersive X-ray system. It characterises multiple layers beneath the specimen surface without destroying the sample, offering higher resolution than dedicated thin film measurement tools at lower cost.
Technical Specifications
| Parameter | Value |
|---|---|
| Specification | Thickness and composition of multiple layers from 2 nm to 2000 nm |
| Specification | Lateral resolution down to 200 nm |
| Specification | Non-destructive analysis |
| Specification | Runs as an option on the AZtec EDS microanalysis system in a SEM or FIB-SEM |
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