Discovery Confocal
Brand: Denton Vacuum | Category: Nanotechnology
A magnetron sputtering system for high volume production that handles substrates up to 300 mm. It takes either a single cathode for tight uniformity or up to four confocal cathodes with triaxis adjustment for co-sputtering without breaking vacuum.
Technical Specifications
| Parameter | Value |
|---|---|
| Substrate size | up to 300 mm |
| Cathodes | single cathode or up to 4 confocal cathodes with triaxis adjustment |
| Power delivery | DC, pulsed DC and RF sputtering |
| Specification | PEM technology for high rate reactive sputtering of metal oxides and nitrides |
| Front ends | single wafer load lock, cassette load lock up to 25 wafers, or cluster tool |
| Software | ProcessPro-HV with SEMI compliant user interface and data logging |
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Contact Vvon Technologies Limited about Denton Vacuum equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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