Brand: Semian | Category: Scientific & Laboratory Equipment

Passive gas treatment device for semiconductor process tool effluent, working without fuel gas or other utilities. It draws room air through the existing scrubber or ventilation system, which keeps running cost and maintenance time low.
| Parameter | Value |
|---|---|
| Specification | No flammable fuel gases required |
| Specification | Dimensions 30 in long x 23 in tall x 14 in wide |
| Specification | Requires only 100 to 220 CFM of scrubber or ventilation air at 1 in W.C. static pressure |
| Specification | Preventive maintenance takes 15 to 45 minutes |
| Specification | Typical maintenance interval 1 to 3 months |
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Contact Vvon Technologies Limited about Semian equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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Burn and wet local scrubber that treats process exhaust from semiconductor tools using an LNG fired combustion stage followed by water scrubbing. Up to four gas inlet ports feed one cabinet, which suits multi chamber tools in the sub fab.
Point of use wet scrubber range for semiconductor reactor effluent containing corrosive, toxic or reactive gases. It handles solids generating gases such as WF6, BCl3 and DCS, and is normally installed in the sub fab or cleanroom chase.
Electrically heated process-gas treatment system using a reaction chamber and cooling stages. The cabinet accepts up to two process-gas inlet ports. Ask Semian to confirm the gas recipe, flow envelope, cooling-water and clean-dry-air requirements for the proposed configuration.