ENVIRO-MATRIX Sentinel
Brand: Semian | Category: Scientific & Laboratory Equipment
Point of use wet scrubber range for semiconductor reactor effluent containing corrosive, toxic or reactive gases. It handles solids generating gases such as WF6, BCl3 and DCS, and is normally installed in the sub fab or cleanroom chase.
Technical Specifications
| Parameter | Value |
|---|---|
| Specification | Removal efficiencies greater than 99% on SiF4, DCS, WF6, HF, HCl and NH3 |
| Specification | N2 shielded inlet prevents water backstreaming to the vacuum pump |
| Specification | Multiple chamber design hydrolyses gases and removes particulates |
| Specification | Integral 50 gallon sump with venturi induced gas flow |
| Specification | Zero pressure drop, solid clear PVC construction |
| Specification | SEMI S2 certified |
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Contact Vvon Technologies Limited about Semian equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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