ENVIRO-MATRIX Cyrus
Brand: Semian | Category: Scientific & Laboratory Equipment
Dry adsorption system that removes and concentrates highly toxic compounds such as arsine, phosphine and germane from semiconductor effluent. Media can also be specified for organic compounds, high molecular weight VOCs, acid gases and ammonia.
Technical Specifications
| Parameter | Value |
|---|---|
| Inlet and outlet connection | 1.5 in KF 40 |
| Maximum inlet gas flow | up to 300 slm |
| Typical gas flow rate | 100 to 150 slm N2 |
| Maximum contaminant flow | 4 to 5% by volume in mixture |
| Canister dimensions | 12 in O.D. x 70 in tall |
| Specification | Single enclosure 32 in L x 32 in W x 92 in H, cabinet exhaust 300 cfm |
Get a Quote
Request an itemised quotation covering the proposed configuration, availability, lead time and agreed supply and support scope.
Useful details to share
- Intended application, process or teaching activity
- Required capability and equipment it must work with
Share what you know. You can start with your name and a phone number or email; final specifications can follow.
Not sure which configuration you need? Help me choose
Contact Vvon Technologies Limited about Semian equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
Back to Scientific & Laboratory Equipment
More from Gas Scrubbers & Abatement
- ENVIRO-MATRIX Sentinel
Point of use wet scrubber range for semiconductor reactor effluent containing corrosive, toxic or reactive gases. It handles solids generating gases such as WF6, BCl3 and DCS, and is normally installed in the sub fab or cleanroom chase.
- ENVIRO-MATRIX Infinity
Point of use system combining a pyrophoric oxidation chamber with multistage wet scrubbing, for silicon nitride deposition and interlayer dielectric exhaust. Gases stay dry until the wet stage, which keeps the inlet port clear of deposits.
- ENVIRO-MATRIX Altair
Passive gas treatment device for semiconductor process tool effluent, working without fuel gas or other utilities. It draws room air through the existing scrubber or ventilation system, which keeps running cost and maintenance time low.