MicroWriter ML3 Baby Plus
Brand: Durham Magneto Optics | Category: Nanotechnology
A desktop direct write lithography machine with two software selectable resolutions, so critical and non-critical areas of a pattern can be exposed in one run. It adds an optical surface profiler and automatic wafer inspection to the Baby platform.
Technical Specifications
| Parameter | Value |
|---|---|
| Maximum writing area | 149 mm x 149 mm |
| Minimum feature sizes | 1 um and 5 um across the full writing area |
| Writing speed | up to 50 mm2 per minute at 1 um and 180 mm2 per minute at 5 um |
| Alignment accuracy | plus or minus 1 um, 3 sigma |
| Specification | 60 nm minimum addressable grid, 15 nm sample stage resolution |
| Specification | Built-in optical surface profiler with 200 nm thickness resolution |
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Contact Vvon Technologies Limited about Durham Magneto Optics equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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