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MicroWriter ML3 Pro

Brand: Durham Magneto Optics | Category: Nanotechnology

MicroWriter ML3 Pro

The top model in the MicroWriter ML3 family, supplied on a passive vibration isolation optical table. It writes over a 195 mm square area at four selectable resolutions and includes a virtual mask aligner mode and multiple wafer handling for overnight runs.

Technical Specifications

ParameterValue
Maximum writing area195 mm x 195 mm, 295 mm x 295 mm optional
Maximum wafer size230 mm x 230 mm x 15 mm, larger sizes optional
Minimum feature sizes0.6 um, 1 um, 2 um and 5 um, 0.4 um optional
Specification385 nm long life semiconductor light source, 365 nm and dual wavelength optional
SpecificationXY interferometer with 1 nm resolution, 4 nm sample stage resolution
Alignment accuracyplus or minus 0.5 um, 3 sigma

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Contact Vvon Technologies Limited about Durham Magneto Optics equipment requirements in Bangladesh.

Phone: +8801805987890 | Email: info@vvon.com.bd

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