MiniLab 026
Brand: Moorfield Nanotechnology | Category: Nanotechnology
The most compact MiniLab modular PVD platform, designed to be glovebox compatible. It supports sputtering plus thermal and low temperature evaporation on substrates up to 6 inches, with HiPIMS and pulsed DC available by configuration.
Technical Specifications
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Maximum substrate size | 6 inch (150 mm) |
| Substrate heating | to 500 deg C for substrates up to 4 inch |
| Thermal and LTE evaporation | TE1 plus LTE sources available |
| Specification | HiPIMS or pulsed DC available with HiPSTER 1 and Pinnacle 1.5 kW supply |
| Rate and thickness monitoring | up to 3 water cooled QCM with optional SQC-310 |
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Contact Vvon Technologies Limited about Moorfield Nanotechnology equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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