MiniLab 030 Compact Modular PVD System
Brand: Moorfield Nanotechnology | Category: Nanotechnology
A compact front loading modular vacuum deposition system built on a single rack. It covers magnetron sputtering, thermal, low temperature and e-beam evaporation for metals, dielectrics and organics, and offers a glovebox mating interface.
Technical Specifications
| Parameter | Value |
|---|---|
| Chamber volume | approximately 30 litre class, 304L stainless steel |
| Substrate capacity | up to 6 inch diameter |
| Source capacity | up to 3 sputter sources or multiple evaporation sources |
| Footprint | approximately 590 x 590 mm single rack, double racks available |
| Pumping | turbomolecular pump with rotary or scroll backing pump, CF100 turbo port |
| Specification | Glovebox mating interface or retrofit option, cleanroom compatible |
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Contact Vvon Technologies Limited about Moorfield Nanotechnology equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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