nanoPVD-ST15A Hybrid PVD System
Brand: Moorfield Nanotechnology | Category: Nanotechnology
A hybrid benchtop system that combines magnetron sputtering with thermal and low temperature evaporation in a single chamber. It suits multilayer thin films, hybrid device stacks, contacts and seed layers where the process route is not yet fixed.
Technical Specifications
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Sputter sources | configurable water cooled magnetrons |
| Evaporation sources | TE1 plus LTE sources |
| Specification | Sputtering and evaporation in a single chamber |
| Maximum substrate size | 4 inch (100 mm) |
| Substrate heating | up to 500 deg C optional |
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Contact Vvon Technologies Limited about Moorfield Nanotechnology equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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