PlasmaPro 100 Nano CVD
Brand: Oxford Instruments | Category: Nanotechnology
The PlasmaPro 100 Nano, formerly Nanofab, is a high temperature CVD and PECVD system for growing 1D and 2D nanomaterials and heterostructures. A cold wall chamber with showerhead delivery supports graphene, hBN, transition metal dichalcogenide and nanotube growth.
Technical Specifications
| Parameter | Value |
|---|---|
| Specification | Flexible temperatures up to 1200 °C |
| Table options | 700 °C, 800 °C or 1200 °C |
| Specification | Sample sizes up to 200 mm |
| Specification | Vacuum load lock for quick sample exchange |
| Specification | Cold wall design with showerhead based precursor delivery |
| Specification | Optional liquid and solid source delivery for MoS2, MoSe2 and other TMDs |
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