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PTIQ

Brand: Oxford Instruments | Category: Nanotechnology

PTIQ

PTIQ is the next generation control software for Oxford Instruments plasma systems, built for the PlasmaPro, Atomfab and Ionfab platforms in both research laboratories and volume production. It logs process data at millisecond accuracy with 1,000-point logging, offers visual proactive readiness indicators, and provides calibration, fault finding and device fingerprinting tools alongside fully programmable multi-cassette load and unload scheduling. The interface is SEMI E95 compliant, touchscreen compatible for cleanroom and yellow-light areas, and supports multi-user profiles for operators, engineers and maintenance teams. Optional modules extend it further, including DiagnostIQs for advanced diagnostics, calibration and predictive maintenance, and a Web API with CSV recipe run data export.

Published software capabilities

ParameterValue
Listed platformsPlasmaPro, Atomfab and Ionfab
Optional diagnosticsDiagnostIQs
Optional log analysisAnalytIQs
Factory integration optionSECS/GEM

Selected manufacturer data for the named configuration. Optical, detector and sample-environment options are ordered separately unless included in the quotation. Measurement results depend on the sample, selected components and operating conditions. Checked 2026-09-29.

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