witec360 Semiconductor Edition
Brand: Oxford Instruments | Category: Nanotechnology
A high end confocal Raman and photoluminescence microscope configured specifically for chemical imaging of semiconducting materials. Wafers up to 12 inch, that is 300 mm, are handled on a 300 by 350 mm scanning stage, and peak shifts below 0.01 cm-1 can be detected. Vibration damping, TrueSurface active focus stabilisation and fully automated microscope control are included, and various laser wavelengths are available.
Selected manufacturer specifications
| Parameter | Value |
|---|---|
| Wafer size | Up to 300 mm (12 inches) |
| Scanning stage | 300 × 350 mm |
| Focus control | TrueSurface active focus stabilisation |
| Wafer chuck | Vacuum pump optional |
Selected manufacturer data for the named configuration. Optical, detector and sample-environment options are ordered separately unless included in the quotation. Measurement results depend on the sample, selected components and operating conditions. Checked 2026-09-29.
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