ACS200 Gen3 Automated Coater and Developer
Brand: SUSS MicroTec | Category: Nanotechnology
An automated cluster coater and developer for wafers from 100 mm to 200 mm. Modular frames scale from research use up to high volume manufacturing, and the GYRSET closed cover method holds a solvent rich layer over the wafer for stable film thickness.
Technical Specifications
| Parameter | Value |
|---|---|
| Wafer sizes | 100 mm to 200 mm |
| Frame options | 3M, 5M and 6M |
| Input and output | 2 or 4 stations, or continuous run load port |
| Resist viscosity | below 100 cp to below 20,000 cp |
| Film thickness | below 100 nm to below 10 µm |
| Passivation layers | below 5 µm to below 250 µm |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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