ACS200 Gen3 TE Automated Coater and Developer
Brand: SUSS MicroTec | Category: Nanotechnology
A throughput enhanced version of the ACS200 Gen3 cluster coater and developer for wafers from 100 mm to 200 mm. Up to six spinner modules can be fitted, and special tooling handles warped, ultra-thin and stacked wafers used in advanced packaging.
Technical Specifications
| Parameter | Value |
|---|---|
| Wafer sizes | 100 mm to 200 mm |
| Throughput | over 30% higher than ACS200 Gen3 |
| Spinner modules | up to six |
| Frame options | 3M, 5M and 6M |
| Resist viscosity | below 100 cp to below 20,000 cp |
| Film thickness | below 100 nm to below 250 µm |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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