Alphacen 300 Drive
Brand: Nanosurf | Category: Nanotechnology
An AFM metrology system for 300 mm wafers, aimed at Angstrom level surface roughness and dimensional measurement in semiconductor quality control. WaveMode photothermal off-resonance imaging raises the line rate while holding tip sharpness, and wafer edge and sidewall inspection is supported.
Technical Specifications
| Parameter | Value |
|---|---|
| Scan range | 100 um x 100 um |
| Sample stage | programmable 300 mm x 300 mm |
| Wafer chucks | 300 mm and 200 mm |
| Line rate | up to 15 Hz with WaveMode, against 1 Hz standard |
| Positioning | sub-micron absolute accuracy |
| Automation | automatic wafer and cantilever alignment, KLARF file routines |
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Contact Vvon Technologies Limited about Nanosurf equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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