AS8 Manual Spray Coater for High Topographies
Brand: SUSS MicroTec | Category: Nanotechnology
A manual spray coater that lays resist over deep three dimensional structures where spin coating cannot reach. Programmable spray and cleaning paths give even edge coverage without resist pooling in trenches, on substrates up to 200 mm.
Technical Specifications
| Parameter | Value |
|---|---|
| Substrate sizes | up to 200 mm round and 6 inch square |
| Nozzle modes | single nozzle for 3 inch to 200 mm, dual nozzle for 150 mm and 200 mm |
| Spray axis velocity | up to 500 mm/s |
| Acceleration | up to 9 m/s2 |
| Chuck rotation | maximum 1,000 rpm |
| Z-axis adjustment | up to 45 mm, nozzle 67.5 mm to 107.5 mm |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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