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ECD8 Semi-Automated Coater or Developer

Brand: SUSS MicroTec | Category: Nanotechnology

ECD8 Semi-Automated Coater or Developer

A compact semi-automated spin coater or developer for substrates up to 200 mm. It has an integrated media cabinet, a transparent hood that keeps the process in view and one-hand wafer centring, and is configured either as a coater or as a developer.

Technical Specifications

ParameterValue
Substrate sizeup to 200 mm
Spin speedup to 8,000 rpm
Accelerationup to 10,000 rpm/s
Viscosity rangeless than 1 cps to 4,000 cps
Dispense linesup to two configurable lines
Recipes200 recipes with 40 steps each

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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.

Phone: +8801805987890 | Email: info@vvon.com.bd

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