Atomic Force Microscope AFM5500MII
Brand: Hitachi High-Tech | Category: Scientific & Laboratory Equipment
The AFM5500MII is an atomic force microscope with a fully addressable 100 mm stage, aimed at medium sized samples. Automated stage addressing and cantilever exchange support unattended measurement and correlation of the same location between AFM and SEM.
Technical Specifications
| Parameter | Value |
|---|---|
| Stage | automated fully addressable 100 mm, travel XY ±50 mm and Z 21 mm or more |
| Minimum step size | XY 2 µm, Z 0.04 µm |
| Scan range | 200 µm x 200 µm x 15 µm |
| RMS noise level | 0.04 nm or less in high resolution mode |
| Repeatability | XY 15 nm or less at 3 sigma, Z 1 nm or less at 3 sigma |
| Sample size | 100 mm diameter, 20 mm thick, 2 kg |
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