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FIB Micro-sampling System

Brand: Hitachi High-Tech | Category: Scientific & Laboratory Equipment

FIB Micro-sampling System

The Micro-sampling System extracts a small pillar of material from a chosen point on a wafer using the ion beam inside the vacuum chamber of a FIB system. The extracted sample is then trimmed and transferred for analysis by TEM or STEM.

Manufacturer-listed workflow

ParameterValue
Sample preparationFIB extraction of a site-specific specimen in vacuum
TransferMicro-sample transfer to a compatible holder
Downstream analysisSTEM or TEM specimen preparation

The manufacturer describes a preparation method and compatible holder workflow. Beam voltage and imaging performance belong to the selected FIB/STEM/TEM instruments, not to this accessory as a universal rating. Checked 2026-09-29.

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