Nanoscale Device Characteristics Analysis System Nano-Prober NP8000
Brand: Hitachi High-Tech | Category: Scientific & Laboratory Equipment
The NP8000 Nano-Prober is a SEM based probing system for electrical characterisation of devices at 5 nm nodes and beyond. It supports electron beam absorbed current imaging, pulsed IV measurement and a temperature controlled stage inside the vacuum chamber.
Technical Specifications
| Parameter | Value |
|---|---|
| Electron gun | Schottky emission source |
| Accelerating voltage | 0.1 kV to 30 kV |
| Probe stage | piezoelectric, fine stroke 5 µm in X and Y |
| Probe coarse stroke | 3 mm X, 5 mm Y |
| Specimen size | 15 mm x 15 mm or smaller, 1 mm thick or less |
| Image shift | ±75 µm at 1.0 kV, WD 5 mm |
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Phone: +8801805987890 | Email: info@vvon.com.bd
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