iSE Ellipsometer
Brand: J.A. Woollam | Category: Nanotechnology
The iSE is an in situ spectroscopic ellipsometer for real time monitoring of thin film deposition and etch. The source and receiver mount on the process chamber and measure through viewports, giving growth rate, thickness and optical constants with sub angstrom sensitivity for feedback control.
Technical Specifications
| Parameter | Value |
|---|---|
| Ellipsometer type | dual rotation optical design |
| Wavelength range | 400 to 1000 nm |
| Number of wavelengths | 190 |
| Data acquisition rate | 0.3 seconds fastest, 1 to 2 seconds typical |
| Beam diameter | about 3 mm |
| Chamber port size | 1.33 in or 2.75 in, typical port angle 60 to 75 degrees from sample normal |
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Contact Vvon Technologies Limited about J.A. Woollam equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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