Brand: J.A. Woollam | Category: Nanotechnology

The theta-SE is a benchtop mapping ellipsometer for checking thin film uniformity across wafers up to 300 mm. A patented dual theta rotation stage, focused beam and camera alignment keep the footprint close to the wafer size while producing thickness and optical constant maps.
| Parameter | Value |
|---|---|
| Mapping coverage | 300 mm diameter |
| Spectral range | 400 to 1000 nm |
| Number of wavelengths | 190 |
| Spot size | nominal 250 x 600 um on sample |
| Angle of incidence | 65 degrees fixed for all measurements |
| Data acquisition rate | 0.61 seconds fastest, 1 to 2 seconds typical |
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Contact Vvon Technologies Limited about J.A. Woollam equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
The M-2000 is a rotating compensator ellipsometer that collects hundreds of wavelengths at once with CCD detection. Modular optics let it sit on a table top base or attach to a process chamber, so the same instrument covers in situ monitoring, large area mapping and general thin film characterisation.
The iSE is an in situ spectroscopic ellipsometer for real time monitoring of thin film deposition and etch. The source and receiver mount on the process chamber and measure through viewports, giving growth rate, thickness and optical constants with sub angstrom sensitivity for feedback control.
The RC2 uses two synchronously rotating compensators and was the first commercial spectroscopic ellipsometer to collect all 16 elements of the Mueller matrix. That makes it suited to anisotropic materials, liquid crystals and nanostructures as well as ordinary thin film work.