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theta-SE Ellipsometer

Brand: J.A. Woollam | Category: Nanotechnology

theta-SE Ellipsometer

The theta-SE is a benchtop mapping ellipsometer for checking thin film uniformity across wafers up to 300 mm. A patented dual theta rotation stage, focused beam and camera alignment keep the footprint close to the wafer size while producing thickness and optical constant maps.

Technical Specifications

ParameterValue
Mapping coverage300 mm diameter
Spectral range400 to 1000 nm
Number of wavelengths190
Spot sizenominal 250 x 600 um on sample
Angle of incidence65 degrees fixed for all measurements
Data acquisition rate0.61 seconds fastest, 1 to 2 seconds typical

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Contact Vvon Technologies Limited about J.A. Woollam equipment requirements in Bangladesh.

Phone: +8801805987890 | Email: info@vvon.com.bd

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