MA200 Gen3 Mask Aligner
Brand: SUSS MicroTec | Category: Nanotechnology
A fully automated mask aligner for high volume production of wafers and square substrates up to 200 mm. It pairs DirectAlign alignment with MO Exposure Optics illumination and ThermAlign thermal compensation for MEMS, radio frequency and power device manufacturing.
Technical Specifications
| Parameter | Value |
|---|---|
| Substrate sizes | wafers and square substrates up to 200 mm |
| Alignment accuracy | 0.5 µm top-side with DirectAlign |
| Resolution | down to 3.5 µm in proximity mode |
| Resolution | below 0.8 µm in contact and vacuum exposure |
| Mask handling | integrated automated mask library |
| Thermal compensation | ThermAlign stabilises chuck and mask temperature |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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