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NIL-SFT12 Series Stamp Fabrication Tool

Brand: SUSS MicroTec | Category: Nanotechnology

NIL-SFT12 Series Stamp Fabrication Tool

A stamp fabrication tool that replicates working stamps for nanoimprint lithography on 300 mm substrates. UV and thermal stamp making sit in one frame, and the high UV irradiance shortens replication from hours to minutes with tight critical dimension control.

Technical Specifications

ParameterValue
Substrate size300 mm
Chuck flatnessdown to 2 µm
UV intensityup to 200 mW/cm2
UV uniformitybetter than ±5%
ModulesUV and thermal stamp fabrication, field upgradeable

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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.

Phone: +8801805987890 | Email: info@vvon.com.bd

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