MaskTrack Smart BD Automated Photomask System
Brand: SUSS MicroTec | Category: Nanotechnology
An automated bake and develop platform for photomask production down to sub 32 nm masks. Dry flip handling, a feedback loop driven by measured critical dimension data and megasonic assisted development keep results consistent across long production runs.
Technical Specifications
| Parameter | Value |
|---|---|
| Mask capability | up to sub 32 nm masks, 90 nm backward compatibility |
| Production | down to 1x nm half-pitch |
| Surface temperature control | 90 °C to 130 °C |
| Hotplate | 25 zones |
| Environment | DIN EN ISO 14644 Class 2 |
| Factory interface | SECS/GEM 200/300 mm, SEMI S2, S8 and S13 compliant |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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