nanoPVD-S10A-WA Wide-Area PVD System
Brand: Moorfield Nanotechnology | Category: Nanotechnology
A wide area version of the benchtop nanoPVD sputtering platform for larger research substrates. It keeps RF and DC magnetron process flexibility while extending coverage to 8 inch substrates for photovoltaic, sensor and transparent conductive oxide work.
Technical Specifications
| Parameter | Value |
|---|---|
| Base pressure | 5x10-7 mbar |
| Maximum substrate size | 8 inch (200 mm) |
| Sputter sources | up to 2 x 2 inch water cooled magnetrons |
| Process gas inlets | up to 3 MFC controlled gases |
| Substrate heating | up to 500 deg C optional |
| Process control | industrial PLC with 7 inch HMI touchscreen |
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Contact Vvon Technologies Limited about Moorfield Nanotechnology equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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