PlasmaPro 100 Cobra ICP RIE
Brand: Oxford Instruments | Category: Nanotechnology
The PlasmaPro 100 Cobra ICP RIE uses a high density inductively coupled plasma for fast etch rates with independent control of substrate bias. It handles wafers up to 200 mm and serves GaAs and InP optoelectronics, microLEDs, SiC and GaN power devices and MEMS.
Plan your specification
Specify the Cobra ICP-RIE process before the tool options
Cobra uses separate ICP and substrate-bias control. The useful configuration depends on the material stack, profile and damage limits of your device.
- Etch result to demonstrate
- Provide the material and mask stack, target depth, feature sizes and acceptance criteria for profile, selectivity and uniformity. Ask for process evidence relevant to that stack.
- Substrate handling and cooling
- State wafer or coupon dimensions, carrier needs and temperature limits. Agree the clamping, backside cooling, electrode and loading arrangement in the proposed configuration.
- Complete installation scope
- Request a schedule of gases, pumping, exhaust treatment, cooling and electrical services. Identify the endpoint option, installation responsibilities and process acceptance demonstration.
Product documentation
Technical Specifications
| Parameter | Value |
|---|---|
| Wafer size | up to 200 mm |
| ICP source sizes | 65 mm and 300 mm |
| Electrode temperature range | -150 °C to 400 °C |
| Specification | Clusters with up to 5 process modules |
| Specification | Transition from 20 °C to -150 °C in as little as 10 minutes |
| Specification | Wafer clamping with helium backside cooling |
Get a Quote
Request an itemised quotation covering the proposed configuration, availability, lead time and agreed supply and support scope.
Useful details to share
- Material/mask stack and target etch depth or profile
- Wafer/coupon size, carrier and temperature limits
Share what you know. You can start with your name and a phone number or email; final specifications can follow.
Not sure which configuration you need? Help me choose
Contact Vvon Technologies Limited about Oxford Instruments equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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