PlasmaPro 100 RIE
Brand: Oxford Instruments | Category: Nanotechnology
The PlasmaPro 100 RIE delivers isotropic and anisotropic dry etching across a wide process range. A single RF plasma source sets both ion density and energy, with load lock and cassette to cassette options for repeatable research and production work up to 200 mm.
Plan your specification
Match the PlasmaPro 100 RIE to your process window
This RIE platform uses one RF plasma source to set both ion density and energy. Evaluate the required process before choosing RIE or a separate-bias ICP system.
- Process and sample evidence
- Describe the layer being removed, mask, endpoint and acceptable profile. Include representative samples or an existing process specification for a suitability discussion.
- Loading and temperature
- Specify sample dimensions and whether work arrives as individual pieces or wafers. Compare the offered load-lock or cassette arrangement, electrode cooling and carrier requirements.
- Recipe and facility scope
- List required process gases and available facility services. Ask what chamber cleaning, endpoint detection, recipe support and acceptance testing are included in the offer.
Product documentation
Technical Specifications
| Parameter | Value |
|---|---|
| Operating pressure | 5 to 500 mTorr |
| Power density | 0.1 to 1.5 W/cm2 |
| Total gas flow | 5 to 200 sccm |
| DC bias generated on lower electrode | 30 to 800 V |
| Electrode temperature range | -150 °C to 400 °C |
| Specification | Clusters with up to 4 process modules |
Get a Quote
Request an itemised quotation covering the proposed configuration, availability, lead time and agreed supply and support scope.
Useful details to share
- Material/mask stack, endpoint and target profile
- Sample dimensions and individual or batch workflow
Share what you know. You can start with your name and a phone number or email; final specifications can follow.
Not sure which configuration you need? Help me choose
Contact Vvon Technologies Limited about Oxford Instruments equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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