RCD8 Semi-Automated Coater and Developer
Brand: SUSS MicroTec | Category: Nanotechnology
A semi-automated resist coating and developing module for wafers up to 200 mm. It suits research and small scale production, handling everything from very thin films to highly viscous thick resists, and runs alone or inside a SUSS LabCluster.
Technical Specifications
| Parameter | Value |
|---|---|
| Substrate size | wafers up to 200 mm |
| Spin speed | up to 10,000 rpm, upgradeable to 12,000 rpm |
| Acceleration | 7,000 rpm/s |
| Viscosity range | less than 1 cps up to 55,000 cps |
| Modules | coater, developer, hotplate and vapour primer |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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