Ultrahigh-Resolution Scanning Electron Microscope SU9600
Brand: Hitachi High-Tech | Category: Scientific & Laboratory Equipment
The SU9600 is the flagship Hitachi cold field emission scanning electron microscope, built for subnanometre observation. An in lens objective and ExB detection give good signal to noise at low probe current, for semiconductor devices and advanced materials.
Technical Specifications
| Parameter | Value |
|---|---|
| Secondary electron resolution | 0.4 nm at 30 kV, 1.0 nm at 1 kV |
| Secondary electron resolution | 0.6 nm at 1 kV landing voltage |
| STEM image resolution | 0.34 nm at 30 kV lattice image |
| Accelerating voltage | 0.5 kV to 30 kV |
| Magnification | 80x to 3,000,000x |
| Maximum specimen size | 5.0 mm x 9.5 mm x 3.5 mm high |
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