Versa Cluster Platform
Brand: Denton Vacuum | Category: Nanotechnology
An automated cluster front end for high volume manufacturing that can carry up to two cassette load locks and six coating chambers. A semiconductor grade robotic handler moves substrates between load lock and modules, so multiple layers can be deposited without breaking vacuum.
Technical Specifications
| Parameter | Value |
|---|---|
| Configuration | up to two cassette load locks and six coating chambers or modules |
| Module size | designed for 200 mm or 300 mm process modules |
| Compatible modules | Discovery sputter, Voyager PE-CVD, Infinity Biased Target Sputter and Infinity Ion Beam Etch |
| Options | dedicated sputter etch modules, dedicated metrology, pre-clean module, substrate conditioning |
| Software | ProcessPro-HV, SEMI E95 compliant, with data logging and charting |
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Contact Vvon Technologies Limited about Denton Vacuum equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
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