Brand: SUSS MicroTec | Category: Nanotechnology

A hybrid bonding cluster that covers wafer to wafer, collective die to wafer and sequential die to wafer processes on one platform. Built with SET Corporation SA, it targets research and pilot lines that later scale into volume production.
| Parameter | Value |
|---|---|
| Substrate sizes | 200 mm to 300 mm |
| Wafer to wafer alignment | below 100 nm |
| Die to wafer alignment | ±100 nm |
| Die to wafer bond force | up to 300 N |
| Die spacing | down to 40 µm |
| Carriers | silicon and glass tape frame carriers |
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Contact Vvon Technologies Limited about SUSS MicroTec equipment requirements in Bangladesh.
Phone: +8801805987890 | Email: info@vvon.com.bd
A mechanical peel-off debonder that separates support carriers from tape mounted wafers at room temperature. A dedicated roller controls the debond wave front, and force, speed and blade insertion height are all set electronically.
An automated sequential die to wafer hybrid bonder that places and bonds individual dies onto a target wafer. Surface activation, die placement and metrology are integrated in one frame for high bandwidth memory and other 3D integrated circuit stacks.
A temporary bonder for 200 mm and 300 mm wafers built for volume manufacturing. Its modular frame accepts commercially available temporary bonding adhesives on silicon or glass carriers, and an on-board metrology module checks alignment during the run.